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The laboratory sputtering systems Z400 and Z400neo (Systec SVS vacuum coatings, Karlstadt, Germany) have 2 sources with HF, DC or pulsed power supply (100W to 3000 W), BIAS voltage on the substrate, ...
The MEGA coating system (multi-source magnetron sputtering system) enables the production of new types of metallic or ceramic coatings in monolithic, graded or multi-layer arrangements using 7 ...
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